Taiwan Semiconductor Research Institute

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Chip System
High-frequency
Nano and Power Device
Cryogenic On-chip

To check usage guidelines or download resources, please refer to Booking System for more information.

Chip System Measurement

Location	No.	Equipment	Introduction	Contact	User Self-service
Hsinchu	HF-201	Chip Photo	🔗	Ms. Chang 7192
	HF-202	Wire Bonder SUB668	🔗	Ms. Chang 7192	V
	HF-203	Laser Cutter	🔗	Ms. Chang 7192	V
	HF-204	Oscilloscope (Lecroy LT584)	🔗	Ms. Chang 7192
	HF-M01	MEMS Measurement System	🔗	Mr. Chang / Mr. Wang 7202 / 7247
	HF-P01	High frequency, High Speed Photonic Integrated Circuit (PIC)/ Electronic Integrated Circuit (EIC) Measurement System	🔗	Mr. Lin 7273
	HF-P02	Silicon Photonics Optical Measurement Systems	🔗	Mr. Zhong 7165
	HF-S01	Advantest V93000 PS1600 Automatic Test System	🔗	Mr. Wu 7196
Tainan	ST-201	Advanced Analog Measurement System	🔗	Mr. Wu 8107
	ST-301	Programmable Compact Temperature & Humidity System	🔗	Mr. Wu 8107
	ST-302	Al Wire Bonding	🔗	Mr. Liu 8109
	ST-303	PCB Prototyping Machine	🔗	Mr. Liu 8109
	ST-304	Chip Image Capture System	🔗	Mr. Liu 8109

High-frequency Measurement

Location	No.	Equipment	Introduction	Contact	User Self-service
Hsinchu	HF-003	67 GHz S-parameter Measurement System	🔗	Mr. Lin 7774	V
	HF-004	High Frequency Noise Pparameter Measurement System	🔗	Mr. Lin 7774	V
	HF-005	High Frequency Power Parameter Measurement System	🔗	Mr. Zhuang 7574	V
	HF-006	Customized High-frequency Circuit Measurement System	🔗	Mr. Shen 7630	V
	HF-009	110 GHz S-parameter Measurement System	🔗	Mr. Chen 7544
	HF-010	Nonlinear Vector Network Analyzer Measurement System	🔗	Mr. Zhuang 7574
	HF-013	Millimeter-wave Noise/Power Parameter Measurement System	🔗	Mr. Zhuang 7574
	HF-014	220 GHz S-parameter Measurement System	🔗	Mr. Deng 7633
	HF-015	110 GHz Harmonic Load Pull Measurement System	🔗	Mr. Cian 7650,7607
	HF-101	40 GHz Measurement System	🔗	Ms. Yang 7667
	HF-101-01	Modulation Signal Measurement System (40 GHz System)	🔗	Ms. Tsai 7736
	HF-102	67 GHz Measurement System	🔗	Mr. Shen 7630
	HF-102-01	Modulation Signal Measurement System (67 GHz System)	🔗	Mr. Shen 7630
	HF-103	Signal Source Parameter Measurement System	🔗	Ms. Tsai 7736
Tainan	ST-101	S-parameter, X-parameter, RF IC, and Load-pull Measurement System	🔗	Mr. Hsiao 8206
Tainan	ST-102	Antenna Measurement System	🔗	Mr. Tu 8112

Nanoscale and Power Device Measurement

Location	No.	Equipment	Introduction	Contact	User Self-service
Hsinchu	HF-001	Nano Device Parameter Measurement Dystem	🔗	Mr. Lin 7638,7456	V
	HF-007	Low Frequency Noise Measurement System	🔗	Mr. Lin 7638,7456	V
	HF-011	IV & CV Electrical Measurement System	🔗	Mr. Lin 7638,7456	V
	HF-012	Power Device Measurement System	🔗	Mr. Chen 7570,7456

Cryogenic On-chip

Location	No.	Equipment	Introduction	Contact	User Self-service
Hsinchu	HF-016	4K Cryogenic Probe Station	🔗	Mr. Chen 7570,7456	V