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Taiwan Semiconductor Research Institute

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Price List

  • User Self-service of the Academia:Charge at 10% of the listed price.
  • OEM Service of the Academia (including Academia Sinica):Technical service fee is assessed at a rate of  10% of the academia's pricing, with materials incurring a 100% charge.
  • User Self-service of the Industry:N/A.
  • OEM Service of the Industry:Charge based on the industry's pricing.
  • TAF-ISO17025 Certificate Fee:Academic: NTD5,000/certificate; industry: NTD10,000/certificate
Notes:
  1. User Self-service or OEM Service: Please go to the Manufacturing and Measurement Analysis Service System / MES System.
  2. For OEM service, if the operation time is less than half an hour (30 min), it will be counted as half an hour.

No. Equipment User Self-service
(NTD/s)
OEM Service
(NTD/h)
Note
NM-005 Ion Polishing System 0.1 --  
NM-006 Field Emission Transmission Electron Microscopy (TEM) 1.5 10,800  
TAF-ISO17025 accredited - 1. Line Width Measurement --
NM-008 X-ray Thin Film Diffractometer (XRD) θ-2θ scan / GIXRD 0.6 50
(NTD/min)
 
TAF-ISO17025 accredited - 1. Phase Identification --  
NM-010 Specimen Preparation -- Silicon Process Cross-section 0.2 15,000
(NTD/pc)
 
 
Specimen Preparation -- Sapphire Process Cross-section 0.2 20,000
(NTD/pc)
 
 
Specimen Preparation -- Other Processes 0.2 Charged based on material nature  
NM-013 Secondary Ion Mass Spectrometer (SIMS) -- Academic :5,000(NTD/h)
Industry :11,000(NTD/unit)
 
TAF-ISO17025 accredited - 1. Depth Profile for Boron
NM-015 X-ray Photoelectron Spectroscopy 100
(NTD/min)
120
(NTD/min)
 
TAF-ISO17025 accredited - 1. Surface Qualitative Analysis --
NM-016 Micro-Fourier Transform Infrared Spectroscopy (Micro-FTIR) 18
(NTD/min)
Academia:25(NTD/min)
Industry :35(NTD/min)
 
NM-017 Bruker Dimension Icon Scanning Probe Microscope 50
(NTD/min)
67
(NTD/min)
1,700
High-resolution AFM requires additional material fee.
NM-018 Electrical Characterization of Semiconductors at Atomic-level Resolution (DHEM) -- 7,000  
NM-019 Nanoindenter 0.72 3,600  
NM-020 Micro-Raman Spectroscopy (Micro-Raman) 33.3
(NTD/min)
Academic :66.7(NTD/min)
Industry :66.7(NTD/min)
User Self-service is only open to the academic community.
NM-021 High resolution X-ray Diffractometer (HR-XRD) 8.3
(NTD/min)
8,000 User Self-service is only open to the academic community.

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Customer Service:tsri-cs@niar.org.tw ext:7610
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