Price List
- User Self-service of the Academia：Charge at 10% of the listed price.
- OEM Service of the Academia (including Academia Sinica)：Technical service fee is assessed at a rate of 10% of the academia's pricing, with materials incurring a 100% charge.
- User Self-service of the Industry：N/A.
- OEM Service of the Industry：Charge based on the industry's pricing.
- TAF-ISO17025 Certificate Fee：Academic: NTD5,000/certificate; industry: NTD10,000/certificate
- User Self-service or OEM Service: Please go to the Manufacturing and Measurement Analysis Service System / MES System.
- For OEM service, if the operation time is less than half an hour (30 min), it will be counted as half an hour.
| No. | Equipment |
User Self-service (NTD/s) |
OEM Service (NTD/h) |
Note | |
|---|---|---|---|---|---|
| NM-002 | Veeco Dimension 5000 Scanning Probe Microscope | 0.45 | -- | Limited to User Self-service | |
| TAF-ISO17025 accredited - 1. Line Width Measurement; 2. Step Height Measurement | -- | ||||
| NM-005 | Ion Polishing System | 0.1 | -- | ||
| NM-006 | Field Emission Transmission Electron Microscopy (TEM) | 1.5 | 10,800 | ||
| TAF-ISO17025 accredited - 1. Line Width Measurement | -- | ||||
| NM-008 | X-ray Thin Film Diffractometer (XRD) | θ-2θ scan / GIXRD | 0.6 |
50 (NTD/min) |
|
| TAF-ISO17025 accredited - 1. Phase Identification | -- | ||||
| NM-009 | Thermal Field Emission Scanning Electron Microscopy (TFSEM) | 0.6 | 3,500 | ||
| TAF-ISO17025 accredited - 1. Line Width Measurement; 2. Surface Image Observation | -- | ||||
| Liquid Specimen Image Observation | |||||
| NM-010 | Specimen Preparation -- Silicon Process | Cross-section | 0.2 |
15,000 (NTD/pc) |
|
| Specimen Preparation -- Sapphire Process | Cross-section | 0.2 |
20,000 (NTD/pc) |
||
| Specimen Preparation -- Other Processes | 0.2 | Charged based on material nature | |||
| NM-013 | Secondary Ion Mass Spectrometer (SIMS) | -- |
Academic ：5,000(NTD/h) Industry ：11,000(NTD/unit) |
||
| TAF-ISO17025 accredited - 1. Depth Profile for Boron | |||||
| NM-014 | Veeco Dimension 3100 Scanning Probe Microscope |
32 (NTD/min) |
AFM ：50(NTD/h) Electrical Scanning ：67(NTD/min) |
||
| NM-015 | X-ray Photoelectron Spectroscopy |
100 (NTD/min) |
120 (NTD/min) |
||
| TAF-ISO17025 accredited - 1. Surface Qualitative Analysis | -- | ||||
| NM-016 | Micro-Fourier Transform Infrared Spectroscopy (Micro-FTIR) |
18 (NTD/min) |
Academia：25(NTD/min)
Industry ：35(NTD/min)
|
||
| NM-017 | Bruker Dimension Icon Scanning Probe Microscope |
50 (NTD/min) |
67 (NTD/min) |
1,700 High-resolution AFM requires additional material fee. |
|
| NM-018 | Electrical Characterization of Semiconductors at Atomic-level Resolution (DHEM) | -- | 7,000 | ||
| NM-019 | Nanoindenter | 0.72 | 3,600 | ||
| NM-020 | Micro-Raman Spectroscopy (Micro-Raman) |
33.3 (NTD/min) |
Academic ：66.7(NTD/min) Industry ：66.7(NTD/min) |
User Self-service is only open to the academic community. | |