Taiwan Semiconductor Research Institute

Process/SIP Introduction

Name：

ADFP 16nm virtual process

Introduction：

ADFP 16nm virtual process

Table 1_Service List for Various Process Chips

Process Code	Category	Technology	Foundry	Full-Custom	Cell-Based	MEMS	Multi-option-MEMS
TN7	CMOS	7 nm	TSMC	V	V	-	-
TN16FFC	CMOS	16 nm	TSMC	V	V	-	-
TN28HPCplu	CMOS	28 nm	TSMC	V	V	-	-
TN40G	CMOS	40 nm	TSMC	V	V	-	-
TN65GP	CMOS	65 nm	TSMC	V	V	-	-
TN90GUTM	CMOS	90 nm	TSMC	V	V	-	-
T18	CMOS	0.18 um	TSMC	V	V	-	-
U18	CMOS	0.18 um	UMC	V	V	V	-
D35	CMOS	0.35 um	TSMC	V	V	-	V
SiGe18	BiCMOS	0.18 um	TSMC	V	-	-	-
P15	GaAs	0.15 um	WIN	V	-	-	-
GaN12	GaN	0.12 um	WIN	V	-	-	-
T18HVG2	CMOS	0.18 um	TSMC	V	V	-	-
IMEC-SiPh	SiPhotonics	0.13 um	IMEC	V	-	-	-
T50GaN	GaN	0.5 um	TSMC	V	-	-	-

Note 1：The minus mark in Table 1 indicates that services for Cell-based/MEMS/Multi-option-MEMS processes are not available.

Table 2_Service List for Various Process Chips

Process Code	Category	Technology	Foundry	Maximum Area of Document Review Case	Area Limit of Educational Chip
TN7	CMOS	7 nm	TSMC	-	-
TN16FFC	CMOS	16 nm	TSMC	-	-
TN28HPCplu	CMOS	28 nm	TSMC	-	-
TN40G	CMOS	40 nm	TSMC	-	-
TN65GP	CMOS	65 nm	TSMC	1	0.8 x 0.8
TN90GUTM	CMOS	90 nm	TSMC	1	1 x 1
T18	CMOS	0.18 um	TSMC	Unlimited	1.2 x 1.2
U18	CMOS	0.18 um	UMC	Unlimited	1.5 x 1.5
U18MEMS	CMOS-MEMS	0.18 um	UMC	Unlimited	1.5 x 1.5
D35	CMOS	0.35 um	TSMC	Unlimited	1.5 x 1.5
Multi-option-MEMS35	Post Process	0.35 um	TSMC/APM	Unlimited	1.5 x 1.5
SiGe18	BiCMOS	0.18 um	TSMC	Unlimited	1.2 x 1.2
P15	GaAs	0.15 um	WIN	Unlimited	equal to 1x1 or 1x2 or 1.5x1 or 1.5x2 or 2x1 or 2.5x1 or 3x1
GaN12	GaN	0.15um	WIN	Unlimited	1 x 1
T18HVG2	CMOS	0.18 um	TSMC	Unlimited	1.3 x 1.3
T50GaN	GaN	0.5 um	TSMC	Unlimited	1.2 x 1.2

Note 1：The minus mark in the above table indicates that the process does not apply to document review or does not involve educational chips.
Note 2：For the area limit, the unit of length is in millimeters(mm), and the unit of area is in square millimeters(mm^2).