Aluminum Metal Etching, Lithography and Cleaning Process Technology
Technology description：
An aluminum metal thin film preparation and aluminum conductor etching process with etching residue cleaning.
Vendor qualifications:
- Industry: Academic research organizations
- Specific required technology: Experience in the implementation and measurement of superconducting quantum bit chips
- Required researchers or technicians: Device lithographic etching process technicians
- No history of breach of contracts
Application method:
Vendors that are interested may fill out the attached application form and provide seven photocopies of the following documents. They must send the form and photocopies to the TSRI’s contact as qualification review information by registered mail prior to the application deadline (the 20th day from the date of announcement).
Required photocopies:
- Photocopy of the certification of registration or incorporation
- Photocopy of the most recent business tax or profit-seeking enterprise income tax payment receipt
- Photocopy of the income statement and balance sheet for the most recent three years that have been CPA-audited
Contact:
Mr. Lo 03-5773693 ext. 7635
E-mail: cglo@narlabs.org.tw
E-mail: cglo@narlabs.org.tw