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Price List

  • User Self-service of the Academia：Charge at 10% of the listed price.
  • OEM Service of the Academia (including Academia Sinica)：Technical service fee is assessed at a rate of *10% of the academia's pricing, with materials incurring a 100% charge.
  • User Self-service of the Industry：Not available.
  • OEM Service of the Industry：Charge based on the industry's pricing.
Notes：
  1. For User Self-service or OEM Service, please go to the Manufacturing and Measurement Analysis Service System / MES System.
  2. For OEM service, if the duration is less than half an hour (30 min), it will be billed as half an hour.

List of Equipment in Tainan


No. Equipment User Self-service OEM Service
Start-up Fee(NTD/time) Usage Fee
Start-up Fee(NTD/time) Usage Fee(NTD/min) Academia(NTD/min) Industry(NTD/h)
SE-001 PECVD&ICP 0 50 1,000 58 6,000
SE-002 STS 0 17 0 42 5,500
SE-003 Sputter 0 22 0 38 2,800
SE-005 Four Point Probe 0 0.1
(NTD/s)		 0 N/A
SE-007 N&K Analyzer 0 0.3
(NTD/s)		 0 1,500
(NTD/h)		 1,500
SE-009 Track 0 27 0 35 35
(NTD/min)
Material Fee 350
(NTD/wafer)
SE-010 Mask Aligner 0 50 20,000 50 14,000
SE-011 RF Sputter 0 13 0 N/A
SE-013 PR Strip & Wet Etching Chemical Hood 0 18 0 N/A
SE-014 Spin Coater 0 5 0 N/A
SE-016 Thermal Coater 0 11 0 36 3,500
SE-017 MJB3 0 6 0 N/A
SE-019 Profile Meter 0 17 1,000 33 2,000
SE-023 3D Laser Microscopy 0 16 0 33 50
(NTD/min)
SE-024 Chip To Wafer Bonder 0 44 0 60 60
(NTD/min)
SE-025 Wafer To Wafer Bonder 0 45 0 62 62
(NTD/min)
Material Fee 5,000
(NTD/wafer)
SE-026 Laser Debonder 0 67 0 83 83
(NTD/min)
SE-027 Wafer Thinning System (Grinder) 0 18 0 35 35
(NTD/min)
SE-028 Electron Beam & Thermal Evaporation  Deposition  System 0 40 0 50 50
(NTD/min)
SE-029 RTP System 0 17 0 25 25
(NTD/min)
SE-030 Cluster RF Sputter 0 30 0 40 40
(NTD/min)
SE-031 Chemical-Mechanical Polishing (CMP) 0 73 1,000 106 6,940
SE-032 Atomic Layer Deposition (ALD) 0 28 0 37 37
(NTD/min)
Material Fee 6
（NTD/cycle)
SE-033 ELIONIX ELS7500-EX 0 35 Industry：20,000 52 6,000
SE-034 Wet Bench – RCA Cleaning 0 40 0 42 2,500
SE-C04 UV-VIS-NIR Spectrophotometer 0 20 0 36 2,340
SE-C14 Gold Sputter 0 0.2
(NTD/s)		 0 N/A
SE-C15 SEM 0 19 0 40 2,500